遠心力による真空チャック面変形の実験およびFEM解析

概要

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This paper deals with the change in shape of the front surface of vacuum chuck employed for ultra precision machining due to the centrifugal force generated by the rotation of the spindle. Displacement, change in shape of the front surface and the diametrical expansion of the chuck made of aluminum are analysed experimentally under several contact conditions. Deformation analyses of the chuck by FEM based on several models for the ordinary contact condition are also carried out to compare with the experimental result. It is clarified that the axial and radial deformations of the aluminum chuck agree well between the experiment and the FEM analysis based on a model with fixed contacts at the interface between the chuck and the spindle. Deformation of another type of chuck consisting of a combination of steel and aluminum parts is also analysed.
一般社団法人日本機械学会の論文
1991-10-25