ロールミルによる気相合成ダイヤモンド粒の製造

概要

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In this paper, preparation of chemical vapor deposition (CVD) diamond grains by roll milling diamond films synthesized by arc discharge plasma jet CVD is described. In this roll milling process, a diamond film is put between metal plates, these are inserted in a thin plastic film case, a diamond film is milled by rolls together with the metal plates. By means of this roll milling technique, it is possible to control sizes of grains produced. Diamond abrasives of #140/170 are often used for grinding wheels. For the purpose of producing the most #140/170 grains from a diamond film, a suitable hardness of metal plates and final distance between metal plates were investigated, and found that a final distance between metal plates which is 1/8-1/15 of a thickness of a diamond film by using stainless steel (SUS304) plates is suitable milling condition. The friability of CVD diamond grains produced by roll milling is intermediate between that of natural diamond grains and commercial synthetic irregular diamond grains. The crystallinity of the diamond grains measure well in terms of X-ray diffraction and Raman spectroscopy.
公益社団法人精密工学会の論文
1991-04-05