水作動液静圧軸受を用いた直動ステージの研究

概要

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New guideway for linear motion is desired for lithography equipments to realize new progress in semiconductor manufacturing. Water-hydrostatic bearing is the best choice for such equipments in clean room, which provides high stiffness and damping, while producing no contamination. The conventional design rule of theoretical or experimental for hydrostatic bearing has been proved to be of no use for water and the new design method has been proposed in our former paper. In this study, the new test stage, which has one linear axis and is equipped with counter type water-hydrostatic bearings, has been manufactured by applying the above design method, and investigated in point of bearing and positioning element. As a result, measured recess pressure, bearing stiffness and flow volume have coincided approximately with simulation values and also have cleared the required specifications. Thus the design method has been verified to be effective in practical use by experiment. By employing steel belt drive system and a conventional NC controller, the positioning repeatability and resolution were evaluated to be within lower sub-micron level. This study can point out the possibility of new type stage which can be available in clean room.
1999-08-05