気相合成によるダイヤモンドのラップ工具への応用

概要

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Diamond and amorphous carbon mixed deposits are synthesized on molybdenum substrates from methane and hydrogen gases by microwave plasma chemical vapor deposition (CVD) method at the methane concentration of 3%. The deposition process and the structure of the mixture deposits are investigated by SEM, X-ray diffraction and Raman spectroscopy, and it was found that the pyramidal-figure diamonds and amorphous carbon mixed particles are deposited at the first stage, then the diamond becomes a dominant factor, and the deposits grow to be (1OO) preferred diamonds. A lapping tool is prepared by using the diamond and amorphous carbon mixed fine grains which are deposited on molybdenum substrates. The lapping experiment of sintered alumina is conducted by this lapping tool. The sintered alumina surface is finished to 0.6 μm Rmax by 30 s lapping. The finishing rate of the alumina is about 1 μm/s. These results suggest that the gas-phase synthesized diamond can be used for the ceramic materials lapping tool.
公益社団法人精密工学会の論文
1990-02-05