YAG レーザ照射による気相合成ダイヤモンド薄板の加工

概要

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In this paper YAG laser cutting and planing of diamond films synthesized by arc discharge plasma jet CVD have been described. As a result, by controlling the energy density, cutting of a CVD diamond is possible. As for etching of CVD diamond in oxygen gas, preferentially amorphous carbon, grain boundary and fault in grain are vaporized and then diamond grains are oxidized. In the case of cutting, diamonds are removed by oxidization and vaporization in the oxygen gas or by graphitization in the argon gas. Therefore by laser irradiation in the oxygen gas, clear cross sections were gained without graphite deposition. Moreover by controlling the incident angle, the surface planing is possible. The roughness of diamond surface after planing by parallel incident laser beam was 3 um Rmax. These diamond films processed by laser could be applied to cutting tools.
1990-12-05