水作動液を用いた静圧軸受の基礎的研究 : 各絞り要素の設計基準の確立

概要

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More precise guideway of lithography equipment is expected to realize major trends of semiconductor manufacturing. Hydrostatic bearings have been used in various kinds of precise machines, and oil should not be applied in clean room and gas is inadequate for stiffness. Normal water should be suitable fluid when cleanness and load capacity are necessary. And also according to properties of heat generation and conduction of water, it will perform better than oil at the point of accuracy maintenance. Usually, characteristics of hydrostatic bearing are calculated regarding oil behaves as viscous flow, and it is questionable to consider water behaves like oil. In this study, pressure-flowrate characteristics of restricters used in fluid-static bearing were investigated on the basic experimental results, and new design rule for fluid-static bearing is proposed.
1998-06-05