負荷の自動認識に基づいた研削用微小切込みテーブルの高機能化

概要

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A piezoelectrically actuated micro positioning table (MPT) which can be retrofitted to enhance the performance of the conventional ceramic grinding machine has been developed. A microcomputer-based control system for the MPT has been established to enable detection of the force acting on the MPT as well as small depth of cut; It has been attested that the increase of force acting on the MPT can be estimated with 1.25N resolution by the increase of control input voltage (CV value) to manipulate the MPT. The experimental results in grinding of ceramics show that the MPT can give better versatility to enable operations such as initial setting up of wheel depth of cut, automated surface grinding, formation of micro profiles on the surface, and in-process compensation of machining errors.
公益社団法人精密工学会の論文
1990-11-05