Si_3N_4セラミックスの鏡面研削機構について

概要

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The mechanism of mirror-finish grinding of Si_3N_4 ceramics was studied under different grinding conditions using a diamond grinding wheel with large grain size(#800, #1200). The main results are summarized below. (1)A good mirror-finished surface with smaller surface roughness was obtained under the grinding conditions of high grindihg force and large theoretical wheel cutting distance. (2)By an ESCA analysis of the mirror-finished surface, it was found that a surface layer comprised mainly of silicon and oxygen was generated, and that Si_3N_4 ceramics with extensive coverage of the surface layer had a good mirror-finish-ground surface. Judging from the above results, it was concluded that the good mirror-finish-ground surface was a result of the plasticity produced by the grinding heat at the contact zone between abrasive grains and the workpiece.
社団法人日本セラミックス協会の論文
1996-01-01