焼結ダイヤモンド上へのダイヤモンド気相合成とその切削工具への応用

概要

論文の詳細を見る
This paper describes the synthesis of diamonds on sintered diamond surfaces by microwave plasma chemical vapor deposition, and its application to cutting tools. First, proper deposition condition of diamonds has been discussed. Sintered diamond which has non-metallic solvent is suitable as a substrate for the deposition of diamonds on the surface; when metallic solvent is used as a substrate, many cracks emerge on the surface of a sintered diamond. Methane concentration of l% is proper. Under this condition, diamonds grow epitaxially on the surface of sintered diamond, and unite the contiguous diamond grains directly. When methane concentration is so high as 3%, both diamonds and amorphous carbon are deposited. The diamonds have pyramidal figure, and grow vertically onto the surfaces of sintered diamond grains. Secondly, a sintered diamond cutting tool covered with diamond film has been presented. This cutting tool wears little on the cutting of hot-pressed sintered alumina because of its high abrasion resistant ability. Thus, it is possible to use this tool for cutting ceramic materials.
公益社団法人精密工学会の論文
1989-09-05