Walking Driveに基づくXYθテーブルの開発(第2報) : 駆動方式の比較検討と小型鉛直面内XYθテーブルの開発

概要

論文の詳細を見る
Two driving methods based on the principle of 'walking drive' are summarized and compared in the present research. The predetermined displacement patterns are applied to the piezoelectric actuators in one method; and the patterns are generated in real time in the other method. Their characteristics are clarified, e.g. the former method is easier to implement while the latter can reduce the number of actuators. A compact XYθ table is developed based on the latter method. The developed XYθtable has unique characteristics such as compactness, ultra-fine positioning resolution, slow and smooth motion, long stroke, frictionless drive, no use any conventional guides, no need to stack up multiple tables, no need for lubricant and high stiffness. Furthermore, the developed table can be driven in the vertical plane, because the table is attached to the driving parts by a permanent magnet. A position feedback controller is developed with capacitive sensors, and some positioning experiments are carried out. The experiments show that the system has a fine positioning resolution of about 30 nm, which corresponds to the noise level of the sensors.
公益社団法人精密工学会の論文
2001-08-05