吸気型ボールプローブの開発 (第1報) : 基本的構成

概要

論文の詳細を見る
The measurement of a diameter of a small hole with low measuring force and a high resolution is one of key issues for evaluating products in the industry of semiconductor and micro machining. However, there is no good sensing system to measure the diameter of a small hole by low measuring force. Therefore, we have developed a novel sensing system using a pneumatic system for measuring the diameter of a small hole. The sensor consists of a small ball, a thin pipe, a vacuum generator and a differential pressure gauge. In this sensor, the small ball is kept at the center of the thin pipe by the vacuum pressure. When the ball touches a wall of a small hole, the ball is shifted from the center of the pipe and it causes the airflow from outside to inside of the pipe. The differential pressure gauge detects the airflow, then the sensor finds the touching between the small ball and the wall of the small hole. A first prototype of the pneumatic ball probe is made and tested. From the theoretical analysis and the experimental tests, the probe is found to detect the touching and to measure the ball shift.
公益社団法人精密工学会の論文
1998-08-05