形体計測における不確かさの見積り(第2報) : 円形体の計測における形状偏差の寄与

概要

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In coordinate metrology, how to estimate the uncertainty of measurement in the specific measuring strategy is a key technique. The estimation method for uncertainties of measured parameters has been already proposed when the only random errors are put in the consideration. In this paper, the effects of systematic errors are theoretically analyzed to estimate the uncertainties in feature-based metrology. A circle feature with from deviations is measured by a coordinate measuring machine. When form deviations have autocorrelation function in position of measured points, the autocorrelation function influences the results of measurement as unknown systematic errors. The method to calculate the error matrix is statistically derived. Using this method, the uncertainties of the measured parameters can also be calculated dealing with autocorrelation function of the measured circle. The series of simulations for this method in statistical way directly implies that the concept and the basic data processing method in this paper are useful to the feature based metrology.
社団法人精密工学会の論文
2003-05-05