Low-Temperature Graphene Growth Originating at Crystalline Facets of Catalytic Metal

スポンサーリンク

概要

著者

関連論文

Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition
Synthesis of a Closely Packed Carbon Nanotube Forest by a Multi-Step Growth Method Using Plasma-Based Chemical Vapor Deposition
High-Quality Carbon Nanotube Growth at Low Temperature by Pulse-Excited Remote Plasma Chemical Vapor Deposition
Low-Temperature Growth of Multiwalled Carbon Nanotubes by Surface-Wave Plasma-Enhanced Chemical Vapor Deposition Using Catalyst Nanoparticles
Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition
Improvement in electrical properties of carbon nanotube via interconnects (Special issue: Advanced metallization for ULSI applications)
Fabrication and Characterization of Planarized Carbon Nanotube Via Interconnects (Special Issue : Advanced Metallization for ULSI Applications)
A Study on Electrical Resistance of Carbon Nanotubes and Their Metal Contacts Using Simplified Test Structure (Special Issue : Advanced Metallization for ULSI Applications)
Low-Temperature Graphene Growth Originating at Crystalline Facets of Catalytic Metal
Improvement in Electrical Properties of Carbon Nanotube Via Interconnects
Low-Resistance Metal Contacts for Nanocarbon/Cobalt Interconnects
Electrical Resistivity Measurements of Layer Number Determined Multilayer Graphene Wiring for Future Large Scale Integrated Circuit Interconnects
Heat-Resistant Co--W Catalytic Metals for Multilayer Graphene Chemical Vapor Deposition
Low-Resistance Metal Contacts for Nanocarbon/Cobalt Interconnects (Special Issue : Advanced Metallization for ULSI Applications)
Electrical Resistivity Measurements of Layer Number Determined Multilayer Graphene Wiring for Future Large Scale Integrated Circuit Interconnects (Special Issue : Microprocesses and Nanotechnology)

もっと見る

スポンサーリンク