Electrical Resistivity Measurements of Layer Number Determined Multilayer Graphene Wiring for Future Large Scale Integrated Circuit Interconnects (Special Issue : Microprocesses and Nanotechnology)
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Ito Kazuyuki
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
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KATAGIRI Masayuki
Low-Power Electronics Association and Project (LEAP)
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Awano Yuji
Department Of Electronics And Electrical Engineering Keio University
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Sakai Tadashi
Low-power Electronics Association & Project (LEAP), Kawasaki 212-8582, Japan
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