Position-Controlled Si Nanocrystals in a SiO_2 Thin Film Using a Novel Amorphous Si Ultra-Thin-Film "Nanomask" due to a Bio-Nanoprocess for Low-Energy Ion Implantation
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2008-03-25
著者
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Nunoshita Masahiro
Graduate School Of Materials Science Nara Institute Of Science And Technology
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OHTA Jun
Graduate School of Materials Science, Nara Institute of Science and Technology
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Ohta Jun
Graduate School Of Materials Science Nara Institute Of Science And Technology
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NAKAMA Yuji
Graduate School of Materials Science, Nara Institute of Science and Technology
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NAGAMACHI Shinji
Ion Engineering Research Institute Corporation
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Nakama Yuji
Graduate School Of Materials Science Nara Institute Of Science And Technology
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