Planar Multielectrode Array Coupled Complementary Metal Oxide Semiconductor Image Sensor for In vitro Electrophysiology

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概要

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• A multielectrode array coupled complementary metal oxide semiconductor (CMOS) image sensor (MARC sensor) was developed for an in vitro electrophysiology experiment. The sensor chip was fabricated by a standard CMOS process, and has a 64 microelectrode array and a $180\times 180$ photodiode pixel array. The size of an on-chip microelectrode is $60\times 60$ μm2 and the pixel size is $7.5\times 7.5$ μm2. In addition, Pt black was fabricated on microelectrodes to obtain stimulation electrodes. The imaging function was demonstrated by the anatomical observation of a mouse hippocampal slice, and the electrical recording function was also demonstrated by monitoring the extracellular field potentials of the brain slice using on-chip microelectrodes. The MARC sensor is compatible with existing in vitro multichannel recording systems. This is the first report supporting our concept that microelectrode arrays and large-sized optical systems can be integrated onto single large-scale integration (LSI) architecture.

• 2011-04-25

著者

• Shiosaka Sadao

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Ohta Jun

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Sasagawa Kiyotaka

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Tokuda Takashi

  Graduate School Of Materials Science Nara Institute Of Science And Technology

• Noda Toshihiko

  Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ohta Jun

  Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ishikawa Yasuyuki

  Graduate School of Biological Sciences, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan

• Nakajima Arata

  Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ishikawa Yasuyuki

  Graduate School of Biological Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Shiosaka Sadao

  Graduate School of Biological Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ohta Jun

  Graduate School of Material Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan

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