Compact Triangulation Sensor Array Constructed by Folded Wafer

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概要

• 論文の詳細を見る
• 2004-09-15

著者

• SASAKI Minoru

  Dept. of Advanced Science and Technology, Toyota Technological Institute

• ENDOU Satoshi

  Dept. of Nanomechanics Eng., Tohoku University

• HANE Kazuhiro

  Dept. of Nanomechanics Eng., Tohoku University

• SASAKI Minoru

  Tohoku University

• HANE Kazuhiro

  Tohoku University

• Hane Kazuhiro

  Dept. Of Nanomechanics Eng. Tohoku University

• Endou Satoshi

  Dept. Of Nanomechanics Eng. Tohoku University

• ENDOU Satoshi

  Tohoku Univ., Dept. of Nanomechanics

• Hane Kazuhiro

  Tohoku Univ. Jpn

• Hane Kazuhiro

  Tohoku Univ. Dept. Of Nanomechanics

• Sasaki Minoru

  Dept. Of Advanced Science And Technology Toyota Technological Institute

• Sasaki Minoru

  Tohoku Univ. Dept. Of Nanomechanics

• Hane Kazuhiro

  Tohoku Univ.

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