Fabrication and Characterization of a Schottky Barrier Diode-Type Ultraviolet Sensor using a ZnO Single Crystal
スポンサーリンク
概要
- 論文の詳細を見る
In this paper, a visible light blind ultraviolet sensor of a Schottky barrier photodiode using a ZnO single crystal is described. The sensor consists of a semitransparent Pt film for the Schottky electrode and Al thin film for the ohmic electrode on an n-type ZnO single crystal substrate grown by the hydrothermal method. The responsivity was 0.12 A/W at the wavelength of 365 nm and the photoresponse time was 12 μs.
- 社団法人 電気学会の論文
- 2007-03-01
著者
-
Goto Shunsuke
Lightom Inc.
-
KASHIWABA Yasube
Iwate University
-
Meguro Kazuyuki
Iwate Industrial Research Institute
-
Hane Kazuhiro
Tohoku Univ. Jpn
-
Kashiwaba Yasube
Department Of Electronic Engineering Sendai National College Of Technology
-
Hasegawa Tatsuo
Iwate Industrial Research Institute
-
ENDO Haruyuki
Iwate Industrial Research Institute
-
SUGIBUCHI Mayo
Iwate Information System Corp.
-
TAKAHASHI Kohsuke
Iwate Information System Corp.
-
OHSHIMA Eriko
Iwate Industrial Research Institute
-
Hane Kazuhiro
Tohoku Univ. Dept. Of Nanomechanics
-
Endo Haruyuki
Electronics And Mechanics Division Iwate Industrial Research Institute
-
Hane Kazuhiro
Tohoku Univ.
-
Hane Kazuhiro
Department of Nanomechanics, Tohoku University
関連論文
- Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer(Micro/Nano Photonic Devices,Microoptomechatronics)
- Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser(Micro/Nano Photonic Devices,Microoptomechatronics)
- Micro-Heater Array for Tunable Fiber-Bragg Grating
- Piezoresistive Rotation Angle Sensor Integrated in Micromirror
- Study of Magnetic Coupling in Proximity Effect between Two Cylindrical Wires excited Various Phase Angles at High Frequencies
- Optical Encoder Having Pitch-Modulated Photodiode Array
- Development of MEMS Capacitive Sensor Using a MOSFET Structure
- Fabrication of MOSFET Capacitive Sensor using Spray Coating Method
- Electrostatic-Comb-Drive 2D Display-Micromirror Operated in Vacuum
- MCH-05 CHARACTERISTICS OF RESONANT MICRO MIRROR IN VACUUM(Micro/Nanomechatronics II,Technical Program of Oral Presentations)
- Technique for Preparing Defect-free Spray Coated Resist Film on Three-Dimensional Micro-Electromechanical Systems
- Fabrication of grating couplers using submicron silicon mold
- Siによる周期可変回折格子
- Compact Triangulation Sensor Array Constructed by Folded Wafer
- Fabrication and Characterization of a Schottky Barrier Diode-Type Ultraviolet Sensor using a ZnO Single Crystal
- Photonic Crystal Waveguide Switches with Movable Slabs(Micro/Nano Photonic Devices,Microoptomechatronics)
- Interferometers based on standing wave detection using thin film photodiodes
- Ultra-thin epitaxial Si photodiode for use in interferometers detecting standing wave
- High-Sensitivity Mid-Ultraviolet Pt/Mg0.59Zn0.41O Schottky Photodiode on a ZnO Single Crystal Substrate
- Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror
- Electrostatically Driven XY-stage Based on SOI-MEMS
- Large Displacement Micro XY-Stage with Paired Moving Plates
- 光書き込み式空間変調器の理論解析
- Full-fiber-type sensing system for physical quantities using a photothermally vibrate quartz-core cantilever (特集 振動型センサ・アクチュエータ)
- イオンスパッタ装置用光学式膜厚計
- Theoretical Analysis of Mechanical-Contact-Based Submicron-Si-Waveguide Optical Microswitch at Telecommunication Wavelengths
- Evaluation of Mechanical-Contact-Based Submicron-Si-Waveguide Optical Switch Performance
- Wavelength Characteristics of Gap-Variable Silicon Nanowire Waveguide Coupler Switch Using Micro Actuator