Large Displacement Micro XY-Stage with Paired Moving Plates
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Bono Fuminori
Tohoku University Dept. Of Nanomechanics
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Hane Kazuhiro
Tohoku Univ. Dept. Of Nanomechanics
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Sasaki Minoru
Toyota Technological Inst. Nagoya Jpn
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Sasaki Minoru
Toyota Technological Institute Dept. Of Advanced Science And Technology
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Hane Kazuhiro
Tohoku Univ.
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