Electrostatic-Comb-Drive 2D Display-Micromirror Operated in Vacuum
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概要
- 論文の詳細を見る
- 2010-06-17
著者
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HANE Kazuhiro
Tohoku University
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Hane Kazuhiro
Tohoku Univ. Dept. Of Nanomechanics
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CHU Hoang
Tohoku University
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Hane Kazuhiro
Tohoku Univ.
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