イオンスパッタ装置用光学式膜厚計
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概要
- 論文の詳細を見る
A quartz core microcantilever fabricated from an optical fiber tip can be utilized for monitoring of deposition thickness. Dynamic monitoring of deposition thickness was performed without influence of electrical noise in an ion sputtering apparatus. Resonance frequencies were measured as a function of deposition time of Au and Ag. Resonance frequency decreased from 11.52kHz to 10.89kHz during a deposition time of 60 minutes which corresponded to a thickness of 360nm in case of Au.
- 社団法人 電気学会の論文
著者
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Kumazaki Hironori
Gifu National College Of Technology
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Hane Kazuhiro
Tohoku Univ. Dept. Of Nanomechanics
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Inaba S
Gifu National College Of Technology
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INABA Seiki
Gifu National College of Technology
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Hane Kazuhiro
Tohoku Univ.
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