Electrostatically Driven XY-stage Based on SOI-MEMS

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概要

• 論文の詳細を見る
• 2004-09-15

著者

• SASAKI Minoru

  Tohoku University

• Hane Kazuhiro

  Tohoku Univ. Dept. Of Nanomechanics

• BOUNO Fuminori

  Tohoku Univ., Dept. of Nanomechanics

• Bouno Fuminori

  Tohoku Univ. Dept. Of Nanomechanics

• Sasaki Minoru

  Tohoku Univ. Dept. Of Nanomechanics

• Hane Kazuhiro

  Tohoku Univ.

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