Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• Hane Kazuhiro

  Tohoku Univ. Dept. Of Nanomechanics

• Sasaki Minoru

  Toyota Technological Inst. Nagoya Jpn

• YUKI Shinya

  Tohoku University, Dept. of Nanomechanics

• Yuki Shinya

  Tohoku University Dept. Of Nanomechanics

• Hane Kazuhiro

  Tohoku Univ.

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