外径70mmのコンフラットフランジにマウントした電子銃内蔵リトラクタブルオージェ電子分光器の製作と評価

概要

論文の詳細を見る
We have developed a retractable Auger electron spectrometer mounted on a conflat flange with an outer diameter of 70 mm. It consists of a commercial miniature electron gun, a miniature cylindrical mirror electron energy analyzer (CMA) with an outer diameter of 34 mm, a commercial 50 mm linear motion feedthrough, and a tilt adjustment mechanism. The CMA consists of a magnetic shield, inner and outer cylinders, a pinhole, and an electron multiplier. An electron gun is assembled in the CMA on axis. Electrons emitted with a polar angle of 26±2° are energy-analyzed and detected. The characteristics of this spectrometer are as follow. 1) It can be installed in a conflat flange port with an inner diameter of 35-38 mm. 2) The electron energy resolution is 0.9∼1.46% (ΔE/E, FWHM). 3) The distance between the sample and the front end of the spectrometer (work distance) is 12 mm. 4) Retractable using the linear motion feedthrough. 5) The tilt can be adjusted. 6) Maximum vacuum bake temperature is 230 °C (non operating). 7) Low cost due to the simple structure. 8) Troubleshooting is easy.
日本真空協会の論文
2005-10-20