CO_2-Laser-Assisted Plasma-Enhanced Chemical Vapor Deposition of Silicon Dioxide Thin Film

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2001-05-01

著者

• Cheng C‐c

  De‐lin Inst. Technol. Taipei Twn

• Lee Ching-ting

  Institute Of Electro-optical And Materials Science National Formosa University

• Liu Hai-pei

  Lee-min Institute Of Technology

• Lee Ching-ting

  Institute Of Optical Sciences National Central University

• TSAI Hung-Sheng

  Lee-Min Institute of Technology

• CHIU Hsin-Ching

  Institute of Optical Sciences, National Central University

• CHANG Sheng-Hsiung

  Department of Electrical Engineering, Far East College

• CHENG Chao-Chia

  Institute of Optical Sciences, National Central University

• Chiu Hsin-ching

  Institute Of Optical Sciences National Central University

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