Si Nanocrystals Embedded in Si Suboxide Matrix Grown by Laser-Assisted Chemical Vapor Deposition at Room Temperature
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概要
- 論文の詳細を見る
We present a novel laser-assisted chemical vapor deposition (LACVD) system for growing Si nanocrystals embedded in a Si suboxide matrix at room temperature. Varying growth gas ratio caused the observed photoluminescence (PL) light emission to vary from 1.65 eV to 1.92 eV without post-annealing. A phase-separated model and PL measurements were used to identify Si nanocrystals embedded in Si suboxides.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2004-05-15
著者
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Lee Ching-ting
Institute Of Electro-optical And Materials Science National Formosa University
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Lin Chun-hung
Institute Of Biological Chemistry Academia Sinica:genomics Research Center Academia Sinica:institute
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Lee Ching-Ting
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 701, Republic of China
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Lin Chun-Hung
Institute of Optical Sciences, National Central University, Chung-Li, Taiwan 320, Republic of China
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