A Piezoelectric ZnO Film Prepared by RF Magnetron Sputtering

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概要

• 論文の詳細を見る
• 2005-09-13

著者

• Liu Day-shan

  Institute Of Electro-optical And Materials Science National Formosa University

• Lee Ching-ting

  Institute Of Electro-optical And Materials Science National Formosa University

• Li Cheng-hsien

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Wu Cheng-yang

  Institute Of Electro-optical And Materials Science National Formosa University

• Li Cheng-Hsien

  Institute of Electro-Optical and Materials Science, National Formosa University, Huwei, Taiwan 63201, Republic of China

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