Dry Etching of Lead-Free (K,Na)NbO Piezoelectric Films by Ar/CF Plasma
スポンサーリンク
概要
著者
-
Kanno Isaku
Department Of Mechanical Engineering Kyoto University
-
Mishima Tomoyoshi
Research & Development Laboratory, Corporate Advanced Technology Group, Hitachi Cable, Ltd., Tsuchiura, Ibaraki 300-0026, Japan
-
Kurokawa Fumiya
Department of Micro Engineering, Kyoto University, Kyoto 606-8501, Japan
-
Horikiri Fumimasa
Research and Development Laboratory, Hitachi Cable, Ltd., Tsuchiura, Ibaraki 300-0026, Japan
-
Shibata Kenji
Research and Development Laboratory, Hitachi Cable, Ltd., Tsuchiura, Ibaraki 300-0026, Japan
-
Suenaga Kazufumi
Research and Development Laboratory, Hitachi Cable, Ltd., Tsuchiura, Ibaraki 300-0026, Japan
-
Watanabe Kazutoshi
Research and Development Laboratory, Hitachi Cable, Ltd., Tsuchiura, Ibaraki 300-0026, Japan
-
Nomoto Akira
Research and Development Laboratory, Hitachi Cable, Ltd., Tsuchiura, Ibaraki 300-0026, Japan
関連論文
- 3317 マイクロ流路における壁面微細構造近傍の流れ場(J26-4 マイクロメカトロニクス(4),J26 マイクロメカトロニクス)
- P-MCH-04 Piezoelectric micropumping system using PZT thin films(Micro/Nanomechatronics,Technical Program of Poster Session)
- MCH-01 DEVELOPMENT OF A NOVEL METHOD FOR STRETCHING DNA FIBERS ON MICROBRIDGES FABRICATED BY SINGLE-MASK INCLINED UV LITHOGRAPHY(Micro/Nanomechatronics I,Technical Program of Oral Presentations)
- Piezoelectric Properties of (K,Na)NbO_3 Films Deposited by RF Magnetron Sputtering
- Pulsed Laser Deposition of High-Quality (K, Na)NbO_3 Thin Films on SrTiO_3 Substrate Using High-Density Ceramic Targets
- Analysis of Leakage Current at Pd/AlGaN Schottky Barriers Formed on GaN Free-Standing Substrates
- Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO3 Films
- Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering
- AN INNOVATIVE POLYMER-BASED MICROPUMP
- Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zrx,Ti1-x)O3 Thin Films
- Modal Analysis for Externally Driven Micropump and Additional Mass Effect of Water
- Dry Etching of Lead-Free (K,Na)NbO Piezoelectric Films by Ar/CF Plasma
- Composition Dependence of Piezoelectric Properties of Pb(Zr,Ti)O3 Films Prepared by Combinatorial Sputtering
- Crystalline Structure of Highly Piezoelectric (K,Na)NbO3 Films Deposited by RF Magnetron Sputtering
- Effect of Inductively Coupled Plasma Etching in p-Type GaN Schottky Contacts
- Piezoelectric Properties of Epitaxial NaNbO3 Thin Films Deposited on (001)SrRuO3/Pt/MgO Substrates
- Electric Field-Induced Strain of PbZrO3 Films
- Determination of Lateral Extension of Extrinsic Photon Recycling in p-GaN by Using Transmission-Line-Model Patterns Formed with GaN p--n Junction Epitaxial Layers
- High-Temperature Isothermal Capacitance Transient Spectroscopy Study on Inductively Coupled Plasma Etching Damage for p-GaN Surfaces
- Determination of Lateral Extension of Extrinsic Photon Recycling in p-GaN by Using Transmission-Line-Model Patterns Formed with GaN p-n Junction Epitaxial Layers (Special Issue : Recent Advances in Nitride Semiconductors)
- Compositional dependence of Pb(Mg