P-MCH-04 Piezoelectric micropumping system using PZT thin films(Micro/Nanomechatronics,Technical Program of Poster Session)
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概要
- 論文の詳細を見る
In this paper, we propose innovative valveless pumping devices for microfluidic systems. The liquid in the microchannel was transported by generating a traveling wave on the channel wall, which was composed of a piezoelectric Pb(Zr,Ti)O_3 (PZT) thin film actuator array. The PZT thin films were deposited on the silicon-on-insulator (SOI) substrates where microchannels, 200 and 500μm wide, were fabricated. The maximum displacements of the 200 and 500μm wide filled channels at 10 V_<PP> were about 61 and 219 nm, respectively. By generating a traveling wave on the channel wall, clear liquid flow could be induced with a mean flow velocity of about 118 and 172μm/s for the 200 and 500μm wide channels, respectively.
- 2009-06-17
著者
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KANNO Isaku
Department of Microengineering, Kyoto University
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Kanno Isaku
Department Of Mechanical Engineering Kyoto University
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Kotera Hidetoshi
Department Of Micro Engineering Kyoto University
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Kotera Hidetoshi
Department Of Mechanical Engineering Kyoto University
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Ogawa Junya
Department of Micro Engineering, Kyoto University
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Ogawa Junya
Department Of Micro Engineering Kyoto University
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Kotera H
Kyoto Univ. Kyoto Jpn
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KOTERA Hidetoshi
Department of Mechanical Engineering, Kyoto University
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Kotera Hidetoshi
Department of Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606-8501, Japan
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