Crystalline Structure of Highly Piezoelectric (K,Na)NbO3 Films Deposited by RF Magnetron Sputtering
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概要
- 論文の詳細を見る
We have previously reported (K,Na)NbO3 (KNN) films, whose piezoelectric properties are the highest reported thus far. In this study, we investigate the detailed crystalline structures of these KNN films after deposition on Pt/MgO and Pt/Ti/SiO2/Si substrates by RF magnetron sputtering. The KNN film on Pt/MgO was epitaxially grown on the Pt lower electrode with a perfect $\langle 001\rangle$ orientation in the perovskite structure. The KNN film on Pt/Ti/SiO2/Si was polycrystalline with a preferential $\langle 001\rangle$ orientation in the perovskite structure having dense columnar grains. X-ray diffraction measurements revealed that the KNN films grown on Pt/MgO and Pt/Ti/SiO2/Si were tetragonal; the lattice parameters c and a were related as $c/a > 1$. The KNN film on Pt/MgO had a higher $c/a$ value than the KNN film on Pt/Ti/SiO2/Si, indicating that the former had more compressed strain. We conclude that this difference in compressed strain may contribute to the difference in piezoelectric properties of the KNN films on Pt/MgO and Pt/Ti/SiO2/Si.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-12-25
著者
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Kanno Isaku
Department Of Mechanical Engineering Kyoto University
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Shibata Kenji
Advanced Electronic Materials Research Department Research And Development Laboratory Hitachi Cable
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Oka Fumihito
Advanced Electronic Materials Research Department Research And Development Laboratory Hitachi Cable
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Nomoto Akira
Advanced Research Center Hitachi Cable Ltd.
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Mishima Tomoyoshi
Advanced Electronic Materials Research Department Research And Development Laboratory Hitachi Cable
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Nomoto Akira
Advanced Electronic Materials Research Department, Research and Development Laboratory, Hitachi Cable, Ltd., 3550 Kidamari, Tsuchiura, Ibaraki 300-0026, Japan
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Oka Fumihito
Advanced Electronic Materials Research Department, Research and Development Laboratory, Hitachi Cable, Ltd., 3550 Kidamari, Tsuchiura, Ibaraki 300-0026, Japan
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