Curie Temperature, Biaxial Elastic Modulus, and Thermal Expansion Coefficient of (K,Na)NbO3 Piezoelectric Thin Films

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概要

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• We investigated fundamental parameters such as the Curie temperature, biaxial elastic modulus, and thermal expansion coefficient of (K,Na)NbO3 (KNN) films on Pt/Ti/SiO2/Si substrates. From the temperature dependence of the dielectric constant of the KNN films, their Curie temperature was approximately 360 °C; this value was confirmed from critical changes in the lattice parameters of the films and the stress induced in the films at approximately this temperature. By using the optical lever method, the biaxial elastic modulus and thermal expansion coefficient of the KNN films were found to be 92 GPa and $8.0\times 10^{-6}$ (1/°C), respectively. The fundamental properties of the KNN films were similar to those of widely used Pb(Zr,Ti)O3 films, indicating that KNN films are potential candidates for lead-free piezoelectric thin films in micro-electro-mechanical system (MEMS) applications.

• 2009-12-25

著者

• Shibata Kenji

  Advanced Electronic Materials Research Department Research And Development Laboratory Hitachi Cable

• Suenaga Kazufumi

  Advanced Electronic Materials Research Department, Research and Development Laboratory, Hitachi Cabl

• Mishima Tomoyoshi

  Advanced Electronic Materials Research Department Research And Development Laboratory Hitachi Cable

• Nomoto Akira

  Advanced Electronic Materials Research Department, Research and Development Laboratory, Hitachi Cable, Ltd., 3550 Kidamari, Tsuchiura, Ibaraki 300-0026, Japan

• Suenaga Kazufumi

  Advanced Electronic Materials Research Department, Research and Development Laboratory, Hitachi Cable, Ltd., 3550 Kidamari, Tsuchiura, Ibaraki 300-0026, Japan

関連論文

• Piezoelectric Properties of (K,Na)NbO_3 Films Deposited by RF Magnetron Sputtering
• Flux Pinning Characteristics in Tl Series Superconductors
• Improvement of Piezoelectric Properties of (K,Na)NbO3 Films Deposited by Sputtering
• Evaluation of Crystal Orientation for (K,Na)NbO Films Using X-ray Diffraction Reciprocal Space Map and Relationship between Crystal Orientation and Piezoelectric Coefficient
• Effect of Lattice Strain and Improvement of the Piezoelectric Properties of (K,Na)NbO3 Lead-Free Film
• Curie Temperature, Biaxial Elastic Modulus, and Thermal Expansion Coefficient of (K,Na)NbO3 Piezoelectric Thin Films
• Crystalline Structure of Highly Piezoelectric (K,Na)NbO3 Films Deposited by RF Magnetron Sputtering

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