Piezoelectric properties of microfabricated (K,Na)NbO3 thin films
スポンサーリンク
概要
- 論文の詳細を見る
A novel microfabrication method of lead-free piezoelectric sodium potassium niobate [(K,Na)NbO3, KNN] thin films was proposed, and the piezoelectric characteristics of the KNN microactuators were evaluated. The KNN thin films were directly deposited on microfabricated Si microcantilevers. The transverse piezoelectric coefficient d31 of the KNN films was calculated as −53.5 pm/V at 20 Vpp from the tip displacement of the microcantilevers. However, the tip displacement showed large electric-field dependence because of the extrinsic piezoelectric effect, and the intrinsic piezoelectric effect of the KNN microcantilevers was smaller than that of KNN on unprocessed thick substrates. In contrast, the extrinsic piezoelectric effect was almost independent of the microfabrication of the KNN films.
著者
-
Kotera H
Kyoto Univ. Kyoto Jpn
-
KOTERA Hidetoshi
Department of Mechanical Engineering, Kyoto University
-
Kotera Hidetoshi
Department of Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606-8501, Japan
関連論文
- Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr, Ti)O-3 Thin Films on Titanium Substrates
- Label-Free Immunosensing for α-Fetoprotein in Human Plasma using Surface Plasmon Resonance
- P-MCH-04 Piezoelectric micropumping system using PZT thin films(Micro/Nanomechatronics,Technical Program of Poster Session)
- P-MCH-03 LOCALIZED SUBSTANCE DELIVERY TO SINGLE CELL BY THREE DIMENTIONAL MICROFLUIDIC DEVICE(Micro/Nanomechatronics,Technical Program of Poster Session)
- MCH-02 DEVELOPMENT OF A TISSUE-LIKE CHIP TO EXCLUSIVELY STIMULATE SINGLE CELL AND DETECT ITS PHYSIOLOGICAL REACTION(Micro/Nanomechatronics I,Technical Program of Oral Presentations)
- MCH-01 DEVELOPMENT OF A NOVEL METHOD FOR STRETCHING DNA FIBERS ON MICROBRIDGES FABRICATED BY SINGLE-MASK INCLINED UV LITHOGRAPHY(Micro/Nanomechatronics I,Technical Program of Oral Presentations)
- 1P-309 電界集中を用いた高収率大量並列電気的細胞融合デバイスの開発(バイオエンジニアリング,第46回日本生物物理学会年会)
- Development of Compact and Precise Design Approach for Multiple Heated Materials with Thermal Design Parameter Optimization
- A STUDY OF CONSTITUTIVE BEHAVIOUR OF POWDER ASSEMBLY BY PARTICULATE MODELING
- Finite Element Analysis of Tape-Head Interface Phenomena of VCR
- Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO3 Films
- Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering
- Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zrx,Ti1-x)O3 Thin Films
- Modal Analysis for Externally Driven Micropump and Additional Mass Effect of Water
- Piezoelectric properties of microfabricated (K,Na)NbO3 thin films
- Effect of Actomyosin Contractility on Lamellipodial Protrusion Dynamics on a Micropatterned Substrate
- Human and mouse induced pluripotent stem cells are differentially reprogrammed in response to kinase inhibitors.
- Composition Dependence of Piezoelectric Properties of Pb(Zr,Ti)O3 Films Prepared by Combinatorial Sputtering
- Piezoelectric Properties of Epitaxial NaNbO3 Thin Films Deposited on (001)SrRuO3/Pt/MgO Substrates
- Electric Field-Induced Strain of PbZrO3 Films