Dissociations of C
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概要
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Investigations of dissociations for c-C<inf>5</inf>F<inf>8</inf>and c-C<inf>5</inf>HF<inf>7</inf>molecules in the excited states were carried out using the molecular orbital method. The excitation energy to the lowest triplet state of c-C<inf>5</inf>F<inf>8</inf>was lower the sum of the total energy of (C<inf>4</inf>F<inf>6</inf>+CF<inf>2</inf>) triplet state. Fragmentation by electron attachment to c-C<inf>5</inf>F<inf>8</inf>did not take place, because the total energy of c-C<inf>5</inf>F<inf>8</inf><sup>-</sup>is more stable than that of (C<inf>4</inf>F<inf>6</inf>+CF<inf>2</inf>)<sup>-</sup>. Hence, the main dissociative product of CF<inf>2</inf>by electron excitation to \pi--\pi^{*} state is created in the plasma of c-C<inf>5</inf>F<inf>8</inf>and c-C<inf>5</inf>HF<inf>7</inf>, with reaction paths of C<inf>4</inf>F<inf>6</inf>+CF<inf>2</inf>and C<inf>4</inf>HF<inf>5</inf>+CF<inf>2</inf>compared with other dissociation paths of C<inf>3</inf>F<inf>4</inf>+C<inf>2</inf>F<inf>4</inf>and C<inf>3</inf>HF<inf>3</inf>+C<inf>2</inf>F<inf>4</inf>. These dissociation pathways have suggested advantageous for dielectric etching with fluorine-deficient chemistry.
- 2013-05-25
著者
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Hori Masaru
Plasma Nanotechnology Research Center Nagoya University
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Sekine Makoto
Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan
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Hayashi Toshio
Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan
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Ishikawa Kenji
Plasma Nano-technology Research Center, Nagoya University, Nagoya 464-8603, Japan
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Hori Masaru
Plasma Nano-technology Research Center, Nagoya University, Nagoya 464-8603, Japan
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Sekine Makoto
Plasma Nano-technology Research Center, Nagoya University, Nagoya 464-8603, Japan
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