Adsorption Kinetic Study of Poly(ethylene glycol) during Copper Electrodeposition by a Microfluidic Device
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概要
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The adsorption behaviour of poly(ethylene glycol) (PEG), used during copper electrodeposition was investigated by using a microfluidic device for electrochemical analysis. First, the effective surface coverage ratio (\theta_{\text{EFF}}) of the electrodes was obtained based on a model in which the current-density transition curve relates to the \theta_{\text{EFF}} of PEG. Then, PEG concentration (c_{\text{PEG}}) and average flow velocity (u) dependency of \theta_{\text{EFF}} were evaluated. The \theta_{\text{EFF}} increased with increasing c_{\text{PEG}} and then reached saturation at 0.65 when the c_{\text{PEG}} exceeded 200 ppm. The \theta_{\text{EFF}} was independent of u; however, the time to reach saturation decreased with decreasing u.
- 2012-05-25
著者
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Saito Takeyasu
Department Of Chemical Engineering Faculty Of Engineering The University Of Tokyo
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Kondo Kazuo
Department Of Applied Chemistry Okayama University
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Okamoto Naoki
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
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Miyamoto Yutaka
Department of Chemical Engineering, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Hattori Sunao
Department of Chemical Engineering, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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