Torsion Fatigue Testing of Polycrystalline Silicon Cross-Microbridge Structures
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概要
- 論文の詳細を見る
In the rapid advancement of micro/nano-electro-mechanical systems (MEMS/NEMS) technology, however, the reliable applications lie in the characterization of the mechanical fatigue properties of the micro/nano-structures. This paper presents the fatigue life of polycrystalline silicon (poly-Si) cross-microbridge in torsion. The torsion testing specimens are fabricated by surface and bulk micromachining. In addition, the stresses of cross-microbridge structures are investigated at various dimensions. The numerical tool ANSYS is applied to calculate the stress distribution of the testing structure. The experimental fatigue life lies between 7.78\times 10^{4}--1.48\times 10^{7} cycles in use of the MTS Tytron 250 microforce testing system. The collective plot of poly-Si fatigue including the results of torsion will provide the MEMS device designer and researcher a good reference in the future applications.
- 2011-06-25
著者
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Hocheng Hong
Department Of Power Mechanical Engineering National Tsing Hua University
-
Sato Kazuo
Department Of Mechanical Engineering Ii Shibaura Institute Of Technology
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Hung Jeng-Nan
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
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Sato Kazuo
Department of Micro--Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan
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