In-situ Monitoring of Cavity Filling in Nanoimprints by Capacitance

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概要

• 論文の詳細を見る

• This report deals with the feasibility of carrying out in-situ monitoring of cavity filling in nanoimprints using capacitance measurements with a capacitance circuit built-in on the mold body. A finite element model valid for the numerical description of a parallel-plate capacitor has been developed, and simulations were carried out to predict the influence of cavity filling on capacitance values. On the other hand, in order to measure the continuous variations in capacitance of a parallel-plate capacitor during the course of imprinting, a series of experiments have been performed isothermally, and the capacitance values have been measured at various imprinting stages. The correlation between capacitance values and replicated polymer heights was studied. The preliminary results presented indicate that capacitance measurement is a feasible tool for the monitoring of cavity filling in nanoimprints.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-06-30

著者

• Hocheng Hong

  Department Of Power Mechanical Engineering National Tsing Hua University

• Nien Chin

  Department of Power Mechanical Engineering, National Tsing Hua University, 101, Sec. 2 Kuang Fu Road, Hsinchu 300, Taiwan, R.O.C.

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• In-situ Monitoring of Cavity Filling in Nanoimprints by Capacitance

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