Formation of Microlens by Reflow of Dual Photoresist

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概要

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• Microlenses have been widely applied in emitters and detectors used in fiber optical communication. Several feasible fabrication methods of microlenses have been reported, namely volume change of a substrate, volume growth in polymethyl methacrylate (PMMA), photoresist reflow method and dripping method. The common concerns are the long processing time and reliability in mass production. The current report presents an innovative process utilizing a dual composite layer to achieve fast and neat fabrication of microball in arrays. The effects of the processing parameter, diameter, thickness of polymer and photoresist, reflow time and temperature have been investigated. The results show that proper heat treatment to achieve high aspect ratio and high thickness of the polymer is essential for making microball lenses.

• 2003-06-15

著者

• Pan Cheng-tan

  Department Of Mechanical And Electro-mechanical Engineering National Sun Yat-sen University

• Hocheng Hong

  Department Of Power Mechanical Engineering National Tsing Hua University

• Cheng Chi-cheng

  Department Of Mechanical And Electro-mechanical Engineering National Sun Yat-sen University

• Cheng Chi-Cheng

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan, ROC

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