Formation of Silicon Nano Tips in Surfactant-Modified Wet Anisotropic Etching

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概要

• 論文の詳細を見る
• 2011-05-25

著者

• SATO Kazuo

  Department of Obstetrics and Gynecology, Nihon University school of Medicine

• Tang Bin

  Department Of Electronic Engineering Shanghai Jiao Tong University

• Tang Bin

  Department Of Micro-nano Systems Engineering Nagoya University

• Sato Kazuo

  Department Of Micro-nano Systems Engineering Nagoya University

• Sato Kazuo

  Department Of Micro-nano System Engineering Nagoya University

• Sato Kazuo

  Department Of Mechanical Engineering Ii Shibaura Institute Of Technology

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