Formation of Silicon Nano Tips in Surfactant-Modified Wet Anisotropic Etching
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概要
- 論文の詳細を見る
- 2011-05-25
著者
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SATO Kazuo
Department of Obstetrics and Gynecology, Nihon University school of Medicine
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Tang Bin
Department Of Electronic Engineering Shanghai Jiao Tong University
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Tang Bin
Department Of Micro-nano Systems Engineering Nagoya University
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Sato Kazuo
Department Of Micro-nano Systems Engineering Nagoya University
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Sato Kazuo
Department Of Micro-nano System Engineering Nagoya University
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Sato Kazuo
Department Of Mechanical Engineering Ii Shibaura Institute Of Technology
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