Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method
スポンサーリンク
概要
- 論文の詳細を見る
- 2010-03-01
著者
-
SATO Kazuo
Department of Obstetrics and Gynecology, Nihon University school of Medicine
-
Asami Kazushi
Research Laboratories Denso Corporation
-
Takeuchi Yukihiro
Research Laboratories Denso Corporation
-
Ohara Junji
Research Laboratories Denso Corporation
-
Sato Kazuo
Department Of Micro-nano System Engineering Nagoya University
-
Sato Kazuo
Department Of Mechanical Engineering Ii Shibaura Institute Of Technology
-
Sato Kazuo
Department of Chemistry, Faculty of Science, Yamagata University
関連論文
- Using polymerase chain reaction for rapid sex-determination of a case of sirenomelia
- Proposal of Pumpless, Valveless, and Flowless Miniaturized Reactor Using Magnetic Beads for the Portable Analysis Device
- Polyimide Film Micromachining by Wet-Etching Technology
- Development of Self-vibration/detection AFM Probe Using Quartz Tuning fork
- NICUにおけるMRSAの現状
- Structure of Giant Resonance in Al^(p, γ) Reaction
- Photoneutron Cross Sections for Ag^, Mo^ and Zr^
- Fine Structure in the N^(γ, n)N^ Activation Curve
- Critical Layer Thickness of n-In_Al_AS/In_Ga_As/In_Al_AS Pseudomorphic Heterostructures Studied by Photoluminescence
- Silicon Micromachining Based on Surfactant-Added Tetramethyl Ammonium Hydroxide: Etching Mechanism and Advanced Applications
- Fabrication of Densely Arrayed Si Needles with Large Height for Transdermal Drug Delivery System Application
- Intestinal Obstruction Caused by Congenital Cytomegalovirus Infection : Report of a Case
- Formation of Silicon Nano Tips in Surfactant-Modified Wet Anisotropic Etching
- Forty-Five Degree Micromirror Fabrication Using Silicon Anisotropic Etching with Surfactant-Added Tetramethylammonium Hydroxide Solution
- Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method
- 57 57. Primary Sarcoma of the Brain : Report of Two Cases
- Fine Structure in the N^(γ, n)N^ Activation Curve II
- Preliminary Results on Electron Acceleration Mechanism in the Slow Theta Pinch
- Instability in Hot Electron Plasma Produced by a Mirror Theta Pinch
- Hot Electron Plasma Produced by Axially Rising Magnetic Field
- Effective Utilization and Reduction of Emissions of the Exhaust Gas in a Two-Stroke-Cycle Engine
- A Basic Study on Fracture Toughness Evaluation of Interfacial Crack in ENF Test Specimen(Optical Method 1)
- Photo Neutron Crosss Sections in Na^ and Si^
- Torsion Fatigue Testing of Polycrystalline Silicon Cross-Microbridge Structures
- L-Dopa Potentiates Presynaptic Inhibitory .ALPHA.2-Adrenoceptor- but Not Facilitatory Angiotensin II Receptor-Mediated Modulation of Noradrenaline Release from Rat Hypothalamic Slices.
- Solvent Effects on the Spin-Lattice Relaxation Times and Chemical Shifts of N-Methylacetamide and N,N-Dimethylacetamide
- The oxidative amination of tropone and tropolone.
- Solvent Effects on the Spin-Lattice Relaxation Times and Chemical Shifts of N-Methylacetamide and N,N-Dimethylacetamide in Hydrogen Bonding Solvents
- Proton Spin-Lattice Relaxation Studies of Intermolecular Interactions in Acetic Acid Solution
- Parallel Real-Time PCR on a Chip for Genetic Tug-of-War (gTOW) Method