Selective Formation of a SnO2 Cap Layer, Its Growth Behavior, and Oxidation Resistance
スポンサーリンク
概要
- 論文の詳細を見る
In this paper, we propose a new method of cap-layer formation. The cap layer of SnO2 is formed by the displacement plating of Sn, followed by the oxidation of the plated Sn. An excellent plating selectivity was found between Cu and SiO2, but not with SiOCH. The SnO2 layer of 90 nm thickness showed a good oxidation resistance of the underlying Cu after heat treatment at 480 °C in air ($P_{\text{O2}}=10^{5}$ Pa). In contrast, the SnO2 layers of 6 and 9 nm thickness showed oxidation resistance at 400 °C in Ar+10 ppm O2 ($P_{\text{O2}}=1$ Pa), but not in Ar+1000 ppm O2 ($P_{\text{O2}}=100$ Pa).
- 2010-05-25
著者
-
Koike Junichi
Department Of Materials Science Graduate School Of Engineering Tohokuuniversity
-
Fujii Yoshihito
Department Of Oral Pathology School Of Dentistry Iwate Medical University
-
Sutou Yuji
Department Of Materials Science Graduate School Of Engineering Tohoku University
-
Junichi Koike
Department of Materials Science, Tohoku University, Sendai 980-8579, Japan
-
Koji Neishi
Department of Materials Science, Tohoku University, Sendai 980-8579, Japan
-
Zifeng Li
Department of Materials Science, Tohoku University, Sendai 980-8579, Japan
関連論文
- Effect of Heat Treatment on the Hardness of Ti-Mo-N Films Deposited by RF Reactive Magnetron Sputtering
- Epitaxial Growth of SrRuO_3 Thin Film Electrode on Si by Pulsed Laser Deposition
- Fabrication of Pseudocubic SrRuO_3 (100) Epitaxial Thin Films on Si by Pulsed Laser Deposition : Surfaces, Interfaces, and Films
- Microstructural Investigation of Pulsed-Laser-Deposited SrRuO_3 Films on Si with SrO Buffer Layers : Semiconductors
- Superplasticity of Cu-Al-Mn-Ni Shape Memory Alloy
- Influence of Co Addition on Martensitic and Magnetic Transitions in Ni-Fe-Ga β Based Shape Memory Alloys
- Martensitic Transformation and Magnetic Properties of Cu-Ga-Mn β Alloys
- Shape Memory Effect Associated with FCC-HCP Martensitic Transformation in Co-Al Alloys
- Magnetic and Martensitic Phase Transformations in a Ni_Ga_Fe Alloy
- Chemical Vapor Deposition of Mn and Mn Oxide and their Step Coverage and Diffusion Barrier Properties on Patterned Interconnect Structures
- Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects
- Immunohistochemical Study of Proliferating Cell Nuclear Antigen(PCNA)and p53 Protein in Oral Precancerous Lesions and Squamous Cell Carcinomas
- High-strength Fe-20Mn-Al-C-based Alloys with Low Density
- Selective Formation of a SnO2 Cap Layer, Its Growth Behavior, and Oxidation Resistance
- Two-Way Shape Memory Effect Induced by Bending Deformation in Ductile Cu-Al-Mn Alloys
- Ordering, Martensitic and Ferromagnetic Transformations in Ni-Al-Mn Heusler Shape Memory Alloys
- Characterization of Chemically Vapor Deposited Manganese Barrier Layers Using X-ray Absorption Fine Structure
- Evaluation of Interface Adhesion Strength in Cu/(Ta–$x$% N, Ta/TaN)/SiO2/Si by Nanoscratch Test
- Simultaneous Formation of a Metallic Mn Layer and a MnO
- Finite Element Method Analysis of Nanoscratch Test for the Evaluation of Interface Adhesion Strength in Cu Thin Films on Si Substrate
- Effects of Water Desorption from SiO2 Substrates on the Thickness of Manganese Oxide Diffusion Barrier Layer Formed by Chemical Vapor Deposition
- Simultaneous Formation of a Metallic Mn Layer and a MnO