Effect of Heat Treatment on the Hardness of Ti-Mo-N Films Deposited by RF Reactive Magnetron Sputtering

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概要

• 論文の詳細を見る
• 2010-08-01

著者

• Sutou Yuji

  Department of Materials Science, Graduate School of Engineering, Tohoku University

• KOMIYAMA Shoko

  Department of Materials Science, Tohoku University

• KOIKE Junichi

  Department of Materials Science, Tohoku University

• Koike Junichi

  Department Of Materials Science Tohoku University

• Sutou Yuji

  Department Of Materials Science Tohoku University

• Koike Junichi

  Department Of Materials Science Graduate School Of Engineering Tohokuuniversity

• Komiyama Shoko

  Department Of Materials Science Tohoku University

• Sutou Yuji

  Department Of Materials Science Graduate School Of Engineering Tohoku University

関連論文

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• Effect of Heat Treatment on the Hardness of Ti-Mo-N Films Deposited by RF Reactive Magnetron Sputtering
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• Two-Way Shape Memory Effect Induced by Bending Deformation in Ductile Cu-Al-Mn Alloys
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• Characterization of Chemically Vapor Deposited Manganese Barrier Layers Using X-ray Absorption Fine Structure
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