Effect of Heat Treatment on the Hardness of Ti-Mo-N Films Deposited by RF Reactive Magnetron Sputtering
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概要
- 論文の詳細を見る
- 2010-08-01
著者
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Sutou Yuji
Department of Materials Science, Graduate School of Engineering, Tohoku University
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KOMIYAMA Shoko
Department of Materials Science, Tohoku University
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KOIKE Junichi
Department of Materials Science, Tohoku University
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Koike Junichi
Department Of Materials Science Tohoku University
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Sutou Yuji
Department Of Materials Science Tohoku University
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Koike Junichi
Department Of Materials Science Graduate School Of Engineering Tohokuuniversity
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Komiyama Shoko
Department Of Materials Science Tohoku University
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Sutou Yuji
Department Of Materials Science Graduate School Of Engineering Tohoku University
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