Focused Ion Beam Milled InGaN/GaN Multiple Quantum Well Nanopillars

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概要

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• The fabrication of nanopillars containing InGaN/GaN multiple quantum wells has been achieved via focused ion beam, using modified beam-shape tuning. Tuning the ion beam astigmatism and/or focusing permits control of the size and shape of III–nitride islands, which makes feasible the fast writing of large-area InGaN/GaN island arrays on epi-layer sample embedded with multiple quantum wells. Interestingly, some islands became high-aspect-ratio nanopillars intermittently under an adequate degree of defocus. Typically, the pillars have diameters of around 100–150 nm and heights of around 600–1500 nm. High-resolution cross-sectional transmission electron microscopy and $Z$-contrast imaging revealed the preserved perfection of single-crystalline nature and quantum well structure of one single pillar, respectively. The optical characterization on the pillars was also carried out by cathodoluminescence, and the peak position showed a blue shift of 35 meV compared with the original epi-layer wafer.

• 2008-04-25

著者

• Lai Wei-chih

  Institute Of Electro-optical Science And Engineering National Cheng Kung University

• Chang Shoou-jinn

  Center For Micro/nano Science And Technology National Cheng Kung University

• WU Shang-En

  Department of Materials Science & Engineering National Cheng Kung University

• HSUEH Tao-Hung

  Center for Micro/Nano Science and Technology National Cheng Kung University

• LIU Chuan-Pu

  Department of Materials Science & Engineering National Cheng Kung University

• Sheu Jinn-Kong

  Institute of Electro-Optical Science and Engineering and Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 701, Republic of China

• Wu Shang-En

  Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan

• Hsueh Tao-Hung

  Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 70101, Taiwan

• Liu Chuan-Pu

  Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan

• Liu Chuan-Pu

  Department of Material Science and Engineering, National Chen-Kung University, Tainan 701, Taiwan, R.O.C.

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