Optical and Electrical Properties of μ-Slice InGaN/GaN Light Emitting Diodes Shaped by Focused Ion Beam Process
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概要
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In this study, slice-type GaN-based light-emitting diodes (μ-slice LEDs) scaled down to a few micrometers using focused ion beam (FIB) process were demonstrated. Electroluminescence peak wavelengths ($\lambda_{\text{p}}$) of the single μ-slice LEDs were nearly independent of driving current density due to the fact that the effects of joule heating and band filling on the shift of $\lambda_{\text{p}}$ compete with each other. The smaller full width of half maximum of electroluminescence peaks observed from the μ-slice LEDs could result from the effect of strain release after the FIB process and thermal annealing during the FIB process on sliced structures.
- 2011-03-25
著者
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Lai Wei-chih
Institute Of Electro-optical Science And Engineering National Cheng Kung University
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Chang Kuo-Hua
Institute of Electro-Optical Science and Engineering, Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 70101, Taiwan
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Lee Ming-Lun
Department of Electro-Optical Engineering, Southern Taiwan University, Tainan 71005, Taiwan
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Chang Kuo-Hua
Institute of Electro-Optical Science and Engineering, Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
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Sheu Jinn-Kong
Institute of Electro-Optical Science and Engineering and Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 701, Republic of China
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Lai Wei-Chih
Institute of Electro-Optical Science and Engineering, Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
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Tu Shang-Ju
Institute of Electro-Optical Science and Engineering, Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
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Hsu Che-Kang
Institute of Electro-Optical Science and Engineering, Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
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Wang Jia-Kuen
Institute of Electro-Optical Science and Engineering, Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
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Lee Ming-Lun
Department of Electro-Optical Engineering, Southern Taiwan University, Yung-Kang, Tainan, Taiwan 71001, R.O.C.
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Lee Ming-Lun
Department of Electro-Optical Engineering, Southern Taiwan University of Technology, Tainan county 710, Taiwan
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