Gratings in GaN Membranes
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概要
- 論文の詳細を見る
In this work, gratings are fabricated on the GaN thin film grown on the silicon substrates. GaN membranes are obtained by removing the silicon below the GaN gratings. The samples are stacked on the GaN diffractive microlenses on sapphire substrates fabricated using gray-level masks. The stacked components are characterized using a He-Ne laser. The laser beam is collimated by the GaN microlenses and diffracted by the GaN gratings. The result demonstrates a stacked microoptics systems in GaN-based materials for the first time.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-08-15
著者
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Li Ming-hung
Department Of Physics National Central University
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Chen Chii-chang
Institute Of Optical Sciences National Central University
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Hou Chia-hung
Institute Of Optical Sciences National Central University
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Wu Chuck
Canyon Materials Inc
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Chang Jenq-yang
Institute Of Optical Sciences National Central University
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Sheu Jinn-Kong
Institute of Electro-Optical Science and Engineering and Advanced Optoelectronic Technology Center and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 701, Republic of China
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Sheu Jinn-Kong
Institute of Optical Sciences, National Central University, 320 Jung-Li, Taiwan, R.O.C.
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Hou Chia-Hung
Institute of Optical Sciences, National Central University, 320 Jung-Li, Taiwan, R.O.C.
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Chi Gou-Chung
Department of Physics, National Central University, 320 Jung-Li, Taiwan, R.O.C.
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Chi Gou-Chung
Department of Optics and Photonics, National Central University, Jhongli, Taoyuan 32001, Taiwan
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Chen Chii-Chang
Institute of Optical Sciences, National Central University, 320 Jung-Li, Taiwan, R.O.C.
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Li Ming-Hung
Department of Physics, National Central University, 320 Jung-Li, Taiwan, R.O.C.
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