Acoustic Wave Manipulation by Phased Operation of Two-Dimensionally Arrayed Nanocrystalline Silicon Ultrasonic Emitters
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概要
- 論文の詳細を見る
To confirm the applicability of thermally induced ultrasound emission from nanocrystalline porous silicon (nc-PS) devices to the directional sound emitter, the spatial emission pattern of a two-dimensionally arrayed nc-PS device has been investigated theoretically and experimentally. A $3 \times 3$ nc-PS device array is fabricated on a p-type Si substrate by conventional electrochemical anodization with the subsequent formation of surface electrodes. It is shown that due to the flat nature of the frequency response of individual emitters, sound wave manipulation is possible in the arrayed device. The directionality of the emission can be controlled by phase-shift driving and by the operating frequency. The arrayed operation enables practical directional and intense ultrasonic emission.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-04-25
著者
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Gelloz Bernard
Graduate School Of Engineering Tokyo University Of A & T
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Sugawara Masahito
Graduate School Of Engineering Tokyo University Of Agriculture And Technology
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Koshida Nobuyoshi
Graduate School Of Eng. Tokyo Univ. Of A&t
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Sugawara Masahito
Graduate School of Engineering, Faculty of Technology, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan
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