Three-Dimensional Image Sensing in Air by Thermally Induced Ultrasonic Emitter Based on Nanocrystalline Porous Silicon
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概要
- 論文の詳細を見る
Ultrasonic three-dimensional (3-D) image sensing in air is successfully demonstrated by combining a novel thermally induced ultrasonic emission from nanocrystalline porous silicon (nc-PS) device with a condenser microphone array. The nc-PS ultrasonic emitter is composed of a patterned heater electrode, an nc-PS layer, and a single-crystalline silicon (c-Si) substrate. In this device, an ideal probe signal can be generated with little reverberation under impulse operation, since the acoustic output shows a flat frequency response in a wide range due to a quick thermo-acoustic conversion at the device surface without any mechanical vibrations. The 3-D object is detected with a spatial resolution considerably higher than that in the case of conventional techniques based on piezoelectric transducers. It is also shown that the device is available for the detection of several objects with different acoustic reflectance coefficients.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Koshida Nobuyoshi
Graduate School Of Eng. Tokyo Univ. Of A&t
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Tsubaki Kenji
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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Koshida Nobuyoshi
Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan
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Yamanaka Hiroshi
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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Kitada Kosaku
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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Komoda Takuya
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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Komoda Takuya
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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Kitada Kosaku
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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Yamanaka Hiroshi
Corporate R&D Planning Office, Matsushita Electric Works, Ltd., Kadoma, Osaka 571-8686, Japan
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