Fabrication of Cold Cathode Ionization Gauge Using Screen-Printed Carbon Nanotube Field Electron Emitter
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概要
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We fabricated a Bayard–Alpert-type ionization gauge using a screen-printed field electron emitter with carbon nanotubes (CNTs) as an electron source. Vertically aligned CNTs grown on Si substrates by thermal chemical vapor deposition was used as the source material for CNT paste to make the screen-printed field emitter. The fabricated gauge responded linearly to the pressure in the range from $10^{-4}$ to $10^{-8}$ Torr, and exhibited a sensitivity of 13 Torr-1, which is competitive with the commercial gauge using a hot-filament electron source. The ion current of the gauge also showed good stability for more than 15 h, indicating the high quality of the electron emitter. This work demonstrated the feasibility of the vacuum electronic device using the CNT field emitter.
- 2008-04-25
著者
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Suto Hirofumi
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Fujii Shunjiro
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Ishida Kazuhiro
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Yoshihara Kumiko
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Honda Shin-ichi
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Katayama Mitsuhiro
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Tanaka Yuya
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Ishida Kazuhiro
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Suto Hirofumi
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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