Self-Assembled GaN Nano-Column Grown on Si(111) Substrate Using Au+Ga Alloy Seeding Method by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Single-crystal GaN nano-column arrays were grown on Au-coated silicon (111) substrate by Au-Ga alloy seeding method using metalorganic chemical vapor deposition (MOCVD). The nano-column arrays were studied as a function of growth parameters and Au thin film thickness. The diameter and length of the as-grown nano-column vary from 100 to 500 nm and 4 to 6 μm, respectively. The surface morphology and optical properties of the nano-columns were investigated using scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX), cathodoluminescence (CL) and photoluminescence (PL). The Au+Ga alloy droplets were found to be uniformly distributed on silicon surface. Further, SEM image reveals a vertical growth and cylindrical in shape GaN nano-column. The chemical composition of the nano-column, which composed of gallium and nitrogen ions, was estimated by EDX. CL reveals a strong band edge emission from the GaN nano-column. PL spectra show a peak at 365.7 nm with a full-width half maximum (FWHM) of 65 meV which indicates good optical quality GaN nano-column with low dislocation density. Our results suggest that single crystal GaN nano-column can be grown on Au+Ga alloy on silicon substrate with a low dislocation density for better device performances.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-04-30
著者
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Kim Dong-wook
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Kang Dong-hun
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Song Jae-chul
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Lee In-hwan
School Of Advanced Materials Engineering And Research Center For Advanced Materials Development Chon
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Ko Eun-a
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Shim Byung-young
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Lee Cheul-ro
School Of Advanced Materials Engineering And Research Center Of Advanced Materials Development Chonb
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Lee Cheul-Ro
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, South Korea
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Kim Dong-Wook
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, South Korea
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Kannappan Santhakumar
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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Kannappan Santhakumar
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, South Korea
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Kannappan Santhakumar
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, Korea
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Shim Byung-Young
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, South Korea
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Ko Eun-A
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, South Korea
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Kang Dong-Hun
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, South Korea
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