InN Nanocolumns Grown on a Si(111) Substrate Using Au+In Solid Solution by Metal Organic Chemical Vapor Deposition
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概要
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InN nanocolumns were grown on a gold-coated Si(111) substrate by metal–organic chemical vapor deposition (MOCVD). Herein, indium predeposition was performed before InN nanocolumn growth. The InN nanocolumns were obtained by forming Au+In solid solution droplets on the Au-coated substrate and subsequently nitriding these droplets. In this study, we investigated the morphological properties of InN nanocolumns by changing the growth conditions such as growth temperature, trimethylindium (TMI) flow rate, and growth pressure. Scanning electron microscopy (SEM) showed that the InN nanocolumns were hexagonal with diameters ranging from 90 to 180 nm and a length of approximately 2.5 μm. The Raman spectrum of the InN nanocolumns showed peaks at 492 and 596 cm-1, which were assigned to E2 and A1 longitudinal optical (LO) phonon modes of InN, respectively. From the high-resolution X-ray diffraction (HR-XRD) spectrum, the predominant diffraction pattern from the InN(101) plane was observed at 33.215°.
- 2009-04-25
著者
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Kim Dong-wook
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Jang Eun-su
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Lee In-hwan
School Of Advanced Materials Engineering And Research Center For Advanced Materials Development Chon
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Lee Seon-ho
School Of Advanced Materials Engineering Engineering College Chonbuk National University
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Lee Cheul-ro
School Of Advanced Materials Engineering And Research Center Of Advanced Materials Development Chonb
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Navamathavan R.
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, 664-14 Deokjin-dong, Deokjin-gu, Chonju 561-756, Republic of Korea
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Navamathavan R.
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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Lee Cheul-Ro
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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Kim Dong-Wook
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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Kannappan Santhakumar
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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Kannappan Santhakumar
School of Advanced Materials Engineering, Engineering College, Chonbuk National University, Chonju 664-14, Chonbuk 561-756, Korea
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Jang Eun-Su
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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Lee Seon-Ho
School of Advanced Materials Engineering, Engineering College, Research Center for Advanced Materials Development (RCAMD), Chonbuk National University, Chonju, Chonbuk 664-14, Korea
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