Copper Filling of Deep Sub-μm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas
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概要
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We investigated the effectiveness of using argon gas with added nitrogen when filling deep sub-μm through-holes with copper by high-vacuum planar magnetron sputtering, and we examined the optimum amount of added nitrogen. This is done by varying the amount of added nitrogen between 0.5, 1.0, 3.0, 10, and 20 at. % in copper filling experiments conducted at a substrate temperature of 280°C and a gas pressure of $ p=9.0\times 10^{-2}$ Pa with 80-nm-diameter holes having an aspect ratio of 5.6. The results show that the optimal amount of added nitrogen for copper filling is 1.0 at. %, and that the proportion of conformal filling is 1/5. The reasons for this are discussed in terms of the energy relationship between copper atoms adsorbed physically or chemically by nitrogen, sputtered atoms, and recoil atoms or molecules.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-02-15
著者
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Kioka Toshihide
Department Of Electrical Engineering Tokyo University Of Science
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Miura Tsutomu
Department Of Applied Bioscience Tokyo University Of Agriculture
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Soumura Tetsuo
Department Of Electrical Engineering Faculty Of Engineering Science University Of Tokyo
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Saito Shigeru
Department Of Anesthesiology And Reanimatology Gunma University School Of Medicine
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Nozue Masanori
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Uhara Yoshio
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Uenosono Takahide
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Nagata Jyunichi
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Oyama Minemasa
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Kioka Toshihide
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Soumura Tetsuo
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Miura Tsutomu
Department of Electrical Engineering, Faculty of Engineering, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8605, Japan
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Saito Shigeru
Department of Anesthesiology and Intensive Care Medicine, Gunma University Graduate School of Medicine
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